iXBT Labs - Computer Hardware in Detail






Latest News

 « Previous Day News Archive  

International EUV Symposium: CaFl is still more expensive than gold

In his speech Peter Silverman, Intel´s director of lithography capital equipment and one of the members of International EUV Symposium, shared his thoughts about EUV tools implementation prospects.
  • To achieve commercial viability, EUV (extreme ultraviolet) scanners must reach throughput levels of about 120 wafers per hour. The current prototypes provide up to 90 wafers per hour throughput, or 60 wafers per hour, considering servicing.
  • Industry´s desired per-scanner target cost is $20 million. Some experts predict EUV scanners to cost $50 million or more.
  • For commercial EUV scanners to be ready for production at the 45-nm process technology node, which moves into commercial production in 2007, Intel and other companies need beta EUV tools by 2005.
  • Optimism about the long-term potential of EUV lithography, which uses 13.5 nm wavelength light is balanced by fears that the solution may exceed the budgets of all but a few manufacturers of microprocessors and memories.
  • At the 45-nm node a logic chip might require four mask levels of EUV lithography for critical layers, another 11 mask layers supplied by 193-nm lithography, and the rest with 248-nm tools.
  • Intel´s primary goal is to make EUV work for critical dimensions at the 45-nm node. The default is to make 157-nm work, or to make 193-nm lithography work by using more reticle enhancement techniques.
  • For the 32-nm node expected in 2009, EUV scanners and masks will be needed for nine layers. The issue for 157-nm lithography is purely a calcium fluoride issue: high-quality calcium fluoride is more expensive than gold. For the 193-nm scanner lenses now coming to the market, about 10 percent of the lens material comes from calcium fluoride. For the 157-nm scanners, all of the lenses are made from the CaFl material.
  • To get high-throughput EUV systems, the laser source must be improved to generate more of the extreme ultraviolet radiation, or light. Today´s best YAG lasers generate only about 10 Watts of radiation, that must be boosted to 100 Watts or more for high-throughput commercial production.
  • The sensitivity of the resist must be improved. The desired target is 2 milliJoules of sensitivity for commercial EUV resists.
  • Currently ASML is the only EUV beta tools vendor. However, Japanese Canon and Nikon promise to ship their prototypes by 2005.

Source: EE Times

 « Previous Day News Archive  

Write a comment below. No registration needed!

blog comments powered by Disqus

  Most Popular Reviews More    RSS  

AMD Phenom II X4 955, Phenom II X4 960T, Phenom II X6 1075T, and Intel Pentium G2120, Core i3-3220, Core i5-3330 Processors

Comparing old, cheap solutions from AMD with new, budget offerings from Intel.
February 1, 2013 · Processor Roundups

Inno3D GeForce GTX 670 iChill, Inno3D GeForce GTX 660 Ti Graphics Cards

A couple of mid-range adapters with original cooling systems.
January 30, 2013 · Video cards: NVIDIA GPUs

Creative Sound Blaster X-Fi Surround 5.1

An external X-Fi solution in tests.
September 9, 2008 · Sound Cards

AMD FX-8350 Processor

The first worthwhile Piledriver CPU.
September 11, 2012 · Processors: AMD

Consumed Power, Energy Consumption: Ivy Bridge vs. Sandy Bridge

Trying out the new method.
September 18, 2012 · Processors: Intel
  Latest Reviews More    RSS  

i3DSpeed, September 2013

Retested all graphics cards with the new drivers.
Oct 18, 2013 · 3Digests

i3DSpeed, August 2013

Added new benchmarks: BioShock Infinite and Metro: Last Light.
Sep 06, 2013 · 3Digests

i3DSpeed, July 2013

Added the test results of NVIDIA GeForce GTX 760 and AMD Radeon HD 7730.
Aug 05, 2013 · 3Digests

Gainward GeForce GTX 650 Ti BOOST 2GB Golden Sample Graphics Card

An excellent hybrid of GeForce GTX 650 Ti and GeForce GTX 660.
Jun 24, 2013 · Video cards: NVIDIA GPUs

i3DSpeed, May 2013

Added the test results of NVIDIA GeForce GTX 770/780.
Jun 03, 2013 · 3Digests
  Latest News More    RSS  

Platform  ·  Video  ·  Multimedia  ·  Mobile  ·  Other  ||  About us & Privacy policy  ·  Twitter  ·  Facebook

Copyright © Byrds Research & Publishing, Ltd., 1997–2011. All rights reserved.