Elpida is ready to produce 90nm DDR2-667/800 SDRAM
Elpida Memory finished the development of 90nm process technology to be used in production of DDR2 SDRAM memory. In particular, the manufacture of 512 Mbit and 1 Gbit DDR2 SDRAM components will be launched in 2005.
According to the company, the new process is expected to raise "company efficiency" by 20%. The new production lines have the same litho tools installed as on 100nm lines — 248nm scanners, optical KrF lithography. Besides, usage of OPC (Optical Proximity Correction) reduces physical dimensions of a memory cell by 90% at the high enough yield.
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