ASML to ship the first 157nm litho scanner
This interesting message arrived from the current SPIE Microlithography: Dutch ASML Holding NV prepares to ship the first 157nm litho tool already in March.
It will be Microscan VII developed by Silicon Valley Group Inc. (SVG; before it was purchased by ASML). And the buyer is Belgian Interuniversities MicroElectronics Center (IMEC), which intends to continue researching usage of such devices for making 65nm chips.
Micrascan VII features CaF2 optics. Intel planned to use something similar, if you remember, but decided to got another way due to delays.
Source: Silicon Strategies
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